Very nice shots. These are difficult to get I know I have been imaging the chips we design. Got started with the D70, then on to the D7000 and soon I'll get some images with my D800. I use the same 105mm Macro lens, sometimes with extenders for higher magnification, which I found better than dipoter lenses or teleconverters. Also found that multiple (4) diffused light sources helps with some of the color fringing on the wafer surface.
A microfocusing rail is a blessing when trying to focus down to micro levels. Also make sure the lens/camera plane is pefectly parallel to the wafer, this harder than it sounds because even a small error in parallalizm will cause the image edges to be out of focus because the DOF is so very small.
I am getting ready to do some images of test chips we have developed in an IBM process called IBM9hp. It's at 90nm BiCMOS process with 300GHz bipolar Silicon Germanium transistors. If a can I will try and post some of these images.
Great job showing what makes our cameras, computers and cell phones work. It's amazing when one considers with the latest silicon CMOS processes we can place 1000~10,000 MOS transistors inside a single D800 pixel!!